New PDF release: Materials Fundamentals of Gate Dielectrics

By Alexander A. Demkov,Alexandra Navrotsky

This publication provides the basics of novel gate dielectrics which are being brought into semiconductor production to make sure the continual scaling of CMOS units. As it is a speedily evolving box of study we elect to target the fabrics that ensure the functionality of gadget purposes. every one of these fabrics are transition steel oxides. paradoxically, the d-orbitals answerable for the excessive dielectric consistent reason serious integration problems, hence intrinsically proscribing high-k dielectrics. notwithstanding new within the electronics a lot of those fabrics are recognized within the box of ceramics, and we describe this specific connection. The complexity of the structure-property family members in TM oxides calls for using cutting-edge first-principles calculations. numerous chapters provide an in depth description of the trendy idea of polarization, and heterojunction band discontinuity in the framework of the density practical thought. Experimental tools contain oxide soften resolution calorimetry and differential scanning calorimetry, Raman scattering and different optical characterization options, transmission electron microscopy, and X-ray photoelectron spectroscopy. some of the difficulties encountered on this planet of CMOS also are appropriate for different semiconductors corresponding to GaAs. A complete assessment of modern advancements during this box is hence additionally given.

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Materials Fundamentals of Gate Dielectrics by Alexander A. Demkov,Alexandra Navrotsky


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