By Marc J. Madou
Designed for technological know-how and engineering scholars, this article makes a speciality of rising traits in tactics for fabricating MEMS and NEMS units. The publication experiences diversified kinds of lithography, subtractive fabric elimination methods, and additive applied sciences. either top-down and bottom-up fabrication techniques are exhaustively coated and the benefits of the several techniques are in comparison. scholars can use this colour quantity as a advisor to aid identify the ideal fabrication process for any kind of micro- or nano-machine.
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Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou