By Jan A. Dziuban
This is the 1st compendium on silicon/glass microsystems made by means of deep rainy etching and the 1st ebook with an in depth description of bonding recommendations utilized in microsystem know-how. Technological effects offered within the e-book were confirmed experimentally by way of the writer and his crew, and will be used in day by day laboratory perform. specific cognizance has been paid to the top point of accessibility of the booklet via students.
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Bonding in Microsystem Technology: 24 (Springer Series in Advanced Microelectronics) by Jan A. Dziuban